Description SQWIRE develops industry compatible CMOS technology based on novel Si nanowire transistor structures.The aim of the SQWIRE project is to develop a disruptive, industry-compatible CMOS technology based on novel silicon nanowire transistor structures. As has been demonstrated both theoretically and experimentally, nanowire MOS transistors can be fabricated at wafer level using silicon-on-insulator (SOI) substrates and these novel devices have shown electrical properties that are comparable or even superior to those of regular transistors. Two such novel devices are the Gated Resistor (a junctionless transistor simulated, prototype fabricated and patented) and the variable-barrier tunnel transistor (VBT, simulated and patented). To obtain industrial validation, fabrication routes will be developed for these devices on novel 300 mm SOI wafers with silicon film thicknesses of only 10 nm. These routes will be underpinned by process development targeting atom-scale control of the silicon film thickness across the wafer. Device performance will be characterised at die-level and evaluated in a statistically meaningful manner at wafer level. The extracted parameters will serve as the basis for the development of a compact model of the Gated Resistor devices, which can be used for further circuit design and the validation of advanced numerical simulations. The fabrication process for the first device (Gated Resistor) is less complex and more flexible than that of regular transistors. It has the potential of increasing yield and reducing the price of integrated circuits. Furthermore, the Gated Resistor offers the promise of superior scaling to sub-22 nm dimensions compared to regular transistors. In addition, the process can easily be implemented in semiconductor materials other than silicon. The second device (Variable Barrier Transistor) is capable of providing subthreshold slopes sharper than any conventional transistor. This permits one to reduce the supply voltage of integrated circuits, and hence their energy consumption.