Microscopic Plasma Sources: Novel Diagnostics and .. (MicPLASMAS)
Microscopic Plasma Sources: Novel Diagnostics and Circuit Integration
(MicPLASMAS)
Start date: Aug 20, 2012,
End date: Aug 19, 2013
PROJECT
FINISHED
It is proposed that Lawrence J. Overzet (LJO), Professor and Assoc. Depart. Chair of Electrical Engineering at The Univ. of Texas at Dallas, move to work with R. Dussart, P. Lefaucheux and their team at CNRS-GREMI / Polytech Orleans for 12 months. The work will focus on micro-plasma source diagnostics and development. In particular, the team will research novel and quantitative diagnostics of micro plasma sources (MPSs) and Micro-Cathode Sustained Discharges (MCSDs). The objective will be to develop MPSs and MCSDs as sources of beneficial chemical species and as tools for the abatement of detrimental chemical species. The longer-term goal is to integrate electronic circuitry with the MPSs and MCSDs to add new capability as well as control. Combining skills and knowledge for one year will greatly increase the progress in this important and interdisciplinary area of plasma science, as well as solidify a long-term international collaboration on this topic. Already, the group at GREMI is fabricating micro-plasma source arrays in silicon. LJO has needed expertise on Si fabrication and plasma diagnostics which will help to springboard this research to world leading level. Therefore the goals of the project are: [1] The transfer to GREMI of Radio Frequency diagnostics, including training on and further development of the techniques, as well as use in diagnosing MPSs and MCSDs; [2] The establishment at GREMI of FTIR diagnostics of MPSs and MCSDs by combining LJO’s expertise and GREMI equipment (new but presently unused); [3] Joint research using UV-Visible Optical Spectroscopic diagnostics of MPSs and MCSDs; [4] Joint research on integrating electronic devices with MPSs and MCSDs; and [5] Outreach activities to Polytech Orleans students as well as local high school students along the lines of the “Marie Curie Ambassador” model. Each goal is expected to lead to results that are high impact.
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