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"Advances in micro-, nano-, and biotechnology put increasing demands on nanoscale microscopy and characterization. Atomic force microscopy (AFM) is one of the highest resolution microscopy methods used in this area. This project focuses on new sensor technology for the detection of the cantilever deflection for high-speed AFM cantilevers. This new technology allow the fabrication of much smaller, ...

... the need for optical cantilever detection. Recent improvements in AFM cantilever technology have increased the imaging speed of AFM by up to two orders of magnitude by miniaturizing AFM cantilevers (SCL-Sensor.Tech., AMG-T). The unique approach in this proposal, which builds on new materials and fabrication processes (Nanoss), will allow the manufacturing of unprecedented small cantilever sensor ...