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Micro-Optical MEMS, micro-mirrors and pico-projectors.Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, ...

General GoalsLab4MEMS will feature the Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, expected to fuel the next generation’s smart sensors and actuators based on MEMS:1. Micro-actuators, micro-pumps, sensors and electrical power generators, integrated on silicon-based piezoelectric materials (PZT) • for use in Data Storage, Ink Jet, Health Care, Automot ...