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...g innovative systems to efficiently contribute to at-line and in-line monitoring and control within semiconductor facilities. Without such equipment, it will not be possible to validate progressively advanced processes during development and manufacturing.Cross-cut R&D activities relating to all equipment assessment sub-projects are covered including APC, model based control, equipment simulation, ...

...mance and reliability capacities of Electro-Mechanical Actuators in hard thermal environmental conditions ready to use in all-electric aircraft. For this global objective, it is planned to develop an advanced, smart, miniaturised and reliable electronic technological platform integrating new compact technologies, advanced components and assembly methods, and new methodology able to substantially i ...