MEMFIS plans to show the feasibility of a miniature spectroscopic chemical sensor system based on a micro-FT-IR spectrometer. Based on mid-infrared spectroscopy offering analyte selectivity unrivalled by any other method and paired with the inherent sensitivity of a FT-IR spectrometer, such devices could be used in a wide range of applications, from air monitoring over in-line real-time process control to security monitoring. The spectrometer utilises innovative optical components based on MEMS-technology, leading to very compact and rugged spectroscopic devices with ultra-rapid scanning capabilities. The addition of a miniature source and a dedicated, highly sensitive detector completes the spectrometer module. Adding electronics and data evaluation and providing a standardised interface to various different modern IR probes, the MEMFIS spectrometer will present a very powerful spectroscopic sensor and a significant step forward in the smart spectroscopic sensors, microsystems technology and vibrational spectroscopy in general.