Prominent aims to incorporate inkjet printing as a part of the MEMS fabrication process. By using maskless, digitally controlled, localized additive processes instead of the subtractive processes used currently, selected steps in the MEMS manufacturing can be done with simplified process sequence. This will result in • lower initial investment cost for a MEMS line• greatly increased flexibility in production, allowing for smaller batches • because of flexibility, easier prototyping and shorter time-to-market period in new devices• new features in the MEMS device• greatly reduced production costs, and• reduced environmental impact due to dimished use of materials, chemicals and waterThe process steps to be developed include via formation and fill, wafer bonding, formation of redistribution layers and deposition of functional materials in MEMS cavities. The project will develop new nanomaterial inks for the above purposes, and evaluate the cost effects of the new manufacturing methods.Europe has had a strong position globally in MEMS manufacturing, but with the tightening competition the pressure for cost reductions is increasing. Prominent will develop a novel low-cost manufacturing methods that are needed to keep the production of MEMS profitable in Europe and open possibilities for increasing business for for MEMS manufacturers, but also for ink and printing equipment manufacturers.