The purpose of the present proposal is to extend and improve the existing facilities and know-how at the Institute of Microelectronics (IMEL) of the National Center for Scientific Research (NCSR) “Demokritos”, recognized as Center of Excellence in Nanoelectronics and MEMS in Greece, and organize and coordinate the access to the infrastructure at regional, national and EU levels. Dissemination and networking activities will be also organized, targeting mainly, but not exclusively, collaborations with the countries in Southeastern Europe in the field of nanofabrication, nanodevices and sensors/MEMS/NEMS. With the existing expertise, know-how and state-of-the-art infrastructure and facilities, complemented by important new equipment that will be purchased within the present proposal, MiNaSys Center of Excellence (MiNaSys-CoE) aims at becoming unique in the Southeastern Europe region. The instruments for the implementation of MiNaSys-CoE will be the following: • Extending and upgrading the existing infrastructure • Recruitment of experienced scientists and engineers • Development of the access to the existing facilities and know-how • Development of networking activities and strategic partnership with other leading research groups in Europe. • Organization of scientific events, thematic sessions and seminars supporting knowledge transfer and research policy development. • Dissemination of results and activities