Improving the cost-competitiveness and approaching grid-parity are the major challenges for micromorph thin-film photovoltaics. This project tackles major factors relating to micromorph module efficiency and production cost by assessing the influences of glass, TCO and silicon deposition (including in-situ cleaning). The project bridges the gap between research and industrial application by executing new developments and improvements in the field of TCO and PECVD reactors and processes and transferring them to production plants where the full impact on module efficiency and costs can be evaluated. On the other hand it also takes some innovations already used in other applications like different glass types and F2 as cleaning gas and transfers these improvements into the photovoltaic application. While different glass types have a high impact on production cost of solar modules, the utilisation of F2 as cleaning gas also has high impact on cost by increasing cleaning rates and decreasing gas cost and also has a strong environmental impact by replacing cleaning gases with a higher global warming potential. All these approaches will not only be developed in parallel but this project will ensure a strong interlink between these activities, e. g. the impact of narrow gap reactors on the F2 cleaning rate. The joint goal of the different work packages is the demonstration of a 157Wp micromorph module with a cost of ownersip (CoO) reduced to 0.5€/Wp. Succeeding in this project will ensure the competitiveness of the micromorph technology and further approach the final goal of grid parity. Having European companies jointly engaged in this project will ensure key players in this important technology branch in Europe, therefore strengthening the European economy. The consortium is comprised of seven partners from four European countries and includes 3 Universities and 4 industrial companies (1 equipment supplier, 1 gas supplier and 2 producers of solar modules).