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The NanoHiTEC project is focused on planar thermo-electric converters based on super-lattice quantum wells, which have shown on laboratory scale already a figure of merit ZT > 4 for a wide temperature range. The optimization of BiTe based layer systems as well as Si/SiGe and B4C/B9C lattices will be combined with the development of low cost/high throughput industrial deposition processes for multi ...