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"The project develops an innovative x-ray source based on the emerging technology of field emitting carbon nanotubes (CNT). This kind of source has several advantages with respect to traditional sources: higher intrinsic brilliance; possibility to work in pulsed and continuous mode; higher peak power; minor power consumption; modularity of beam size; good stability and longer life time. These sour ...

Description MAGIC has supported the development of e-beam based maskless lithography technology in Europe: Two parallel lithography tool developments for 32nm CMOS and beyond and on lithography infrastructure.In the CMOS manufacturing environment, the mask-based optical lithography technique is up to now driving solution to deal with all ...