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Multi-functional Analytical Focussed ion beam tool for nanotechnology (FIBLYS)
Start date: Sep 1, 2008, End date: Aug 31, 2011,
The project FIBLYS aims at developing an innovative nanostructuring, nanomanipulation and nanoanalysis instrument: a hybrid scanning probe (SPM) and dual beam focussed ion beam (FIB) instrument (including scanning electron microscopy (SEM) capabilities). In addition to an instrument based on conventional dual beam FIB(SEM) technology, an SPM/FIB(SEM) microscope will use both techniques, integrat ...
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