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Gas Flows in Micro Electro Mechanical Systems (GASMEMS)

Start date: Oct 1, 2008, End date: Sep 30, 2012,

Gas flows in microsystems are of great interest for various applications that touch almost every industrial field. This diversity is typified through the following examples: fluidic microactuators for active control of aerodynamic flows, vacuum generators for extracting biological samples, mass flow and temperature micro-sensors, pressure gauges, micro heat-exchangers for the cooling of electronic ...
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