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2 European Projects Found

Searched on 125080 European Projects

 FINISHED 

3D Advanced Metrology and materials for advanced devices (3DAM)

Start date: Apr 1, 2016, End date: Mar 31, 2019,

The objective of the 3DAM project is to develop a new generation of metrology and characterization tools and methodologies enabling the development of the next semiconductor technology nodes. As nano-electronics technology is moving beyond the boundaries of (strained) silicon in planar or finFETs, new 3D device architectures and new materials bring major metrology and characterization challenges w ...
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 18

 FINISHED 

Metrology for future 3D-technologies (METRO4-3D)

Start date: Feb 1, 2016, End date: Jan 31, 2019,

...his project i.e a Tofsims system (IonTOF) with build-in Scanning Probe stage and FIB column for true 3D-composition profiling, a completely automated micro-Hall and sheet resistance measurement tool (Capres) with additional capabilities for measurements on dedicated test structures (prior to full BEOL) and an GHz acoustic Microscope (Tepla) for probing voids in TSV’s and stacked dies. As some of ...
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 9