1 European Projects Found
Searched on 125080 European Projects
FINISHED
High volume piezoelectric thin film production process for microsystems (piezoVolume)
Start date: Jan 1, 2010, End date: Dec 31, 2012,
This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS ...
Read Project
